发明名称 Wafer structure and epitaxial growth method for growing the same
摘要 A wafer structure and epitaxial growth method for growing the same. The method may include forming a mask layer having nano-sized areas on a wafer, forming a porous layer having nano-sized pores on a surface of the wafer by etching the mask layer and a surface of the wafer, and forming an epitaxial material layer on the porous layer using an epitaxial growth process.
申请公布号 US8475588(B2) 申请公布日期 2013.07.02
申请号 US20090382329 申请日期 2009.03.13
申请人 PARK SUNG-SOO;SAMSUNG CORNING PRECISION MATERIALS CO., LTD. 发明人 PARK SUNG-SOO
分类号 C30B1/02;H01L21/205 主分类号 C30B1/02
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