发明名称 Solid state image pickup device and method for manufacturing solid state image pickup device
摘要 A method for manufacturing a solid state image pickup device including a first active region provided with a first conversion unit, a second active region provided with a second conversion unit, and a third active region adjoining the first and the second active regions with a field region therebetween and being provided with a pixel transistor, the method including the steps of ion-implanting first conductivity type impurity ions to form a semiconductor region serving as a potential barrier against the signal carriers at a predetermined depth in the third active region and ion-implanting second conductivity type impurity ions into the third active region with energy lower than the above-described ion-implantation energy.
申请公布号 US8476102(B2) 申请公布日期 2013.07.02
申请号 US201113029046 申请日期 2011.02.16
申请人 TAKADA HIDEAKI;KOIZUMI TORU;YAMAZAKI YASUO;RYOKI TATSUYA;CANON KABUSHIKI KAISHA 发明人 TAKADA HIDEAKI;KOIZUMI TORU;YAMAZAKI YASUO;RYOKI TATSUYA
分类号 H01L21/00 主分类号 H01L21/00
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