PREPARATION METHOD OF CZTSE-BASED THIN FILM USING CO-EVAPORATION AND CZTSE-BASED THIN FILM PREPARED BY THE SAME
摘要
<p>PURPOSE: A method for manufacturing a CZTSe group thin film for a solar cell using co-evaporation process and a CZTSe group thin film manufactured by the same are provided to increase energy conversion efficiency, by achieving uniform element distribution. CONSTITUTION: Cu, Zn, Sn and Se are deposited on a substrate. The deposition is performed at a substrate temperature of 450-600°C. The deposition is performed by using co-evaporation. Sn and Se are additionally deposited according to the co-evaporation. The reduced substrate temperature is used for the additional deposition. [Reference numerals] (AA) Temperature (°C); (BB) Time (minute)</p>
申请公布号
KR20130072738(A)
申请公布日期
2013.07.02
申请号
KR20110140283
申请日期
2011.12.22
申请人
KOREA INSTITUTE OF ENERGY RESEARCH
发明人
GWAK, JI HYE;YUN, JAE HO;AHN, SE JIN;YOON, KYUNG HOON;JUNG, SUNG HUN;SHIN, KEE SHIK;AHN, SEOUNG KYU;CHO, A RA;PARK, SANG HYUN