SPACE TRANSFORMER FOR PROBE CARD AND MANUFACTURING METHOD OF SPACE TRANSFORMER FOR PROBE CARD

摘要

PURPOSE: A space transformer for a probe card and a method for manufacturing the space transformer are provided to simplify the structure of the space transformer by integrating a probe tip and an interposer with a wire part, thereby improving durability. CONSTITUTION: A wire part (20) is vertical to a support block (10). The upper and the lower part of the wire part are electrically connected to an interposer and a probe tip respectively. The wire part is manufactured by a MEMS (Micro Electro Mechanical System) method. The wire part is integrated with the interposer and the probe tip. The wire part includes a conducting wire and an insulator coated on the outer surface of the conducting wire.