COMPOSITIONS FOR ANTIREFLECTIVE COATINGS

摘要

PURPOSE: An antireflection coating composition is provided to form an antireflection layer with improved bottom antireflective coating composition performance. CONSTITUTION: An antireflection coating composition includes a curing catalyst represented by chemical formula A: [NR1'R2'R3'R4']^+ X^-, and a prepolymer. The prepolymer is formed from a first composition which is selected from a compound represented by chemical formula 1: Ra-SiR1R2R3, a compound represented by chemical formula 2: Rb-SiR4R5R6, a compound represented by chemical formula 3: Rc-SiR7R8R9, and a compound represented by chemical formula 4: SiR10R11R12R13.