发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
摘要 <p>A silicon carbide substrate (30) includes: an n-type drift layer (32) having a first surface (S1) and a second surface (S2) that face each other; p-type body regions (33) disposed on the first surface (S1) of the n-type drift layer (32); and n-type emitter regions (34) disposed on the p-type body regions (33) in such a manner as to be separated from the n-type drift layer (32) by the p-type body regions (33). A gate insulating film (11) is disposed on the p-type body regions (33) in such a manner as to connect the n-type drift layer (32) and the n-type emitter regions (34). A p-type silicon collector layer (70) is directly disposed on the silicon carbide substrate (30) in such a manner as to face the second surface (S2) of the n-type drift layer (32).</p>
申请公布号 WO2013094297(A1) 申请公布日期 2013.06.27
申请号 WO2012JP76689 申请日期 2012.10.16
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 WADA, KEIJI;HIYOSHI, TORU
分类号 H01L29/739;H01L21/336;H01L29/12;H01L29/78 主分类号 H01L29/739
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