| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that a deposited surface flows, thinly extended molten burrs, projected at a chamber 15 side, is formed, and cracks are generated at the thinly extended molten burrs in a substrate 6 in a pressure buffering apparatus 1 with a flexible film 4 deposited on the substrate 6. <P>SOLUTION: A pressure buffering apparatus includes: a substrate 6 having a recess 2 and an inflow communication port 3a communicated with an outer region on an inner surface of the recess 2; and a flexible film 4 bonded to an upper end surface TS of the recess 2, and closes an open end of the recess 2, and also includes a region R in which the thinly extended molten burrs, projected at the inner side rather than the inner surface SS of the recess 2 are not formed between the flexible film 4 and the upper end surface TS. <P>COPYRIGHT: (C)2013,JPO&INPIT |
