发明名称 EXPOSURE APPARATUS
摘要 An exposure apparatus includes an irradiating part which irradiates light, a light blocking member including a light condensing part at a side of the light blocking member, where the light condensing part condenses the light, a mask which is spaced apart from the light blocking member by a first distance, and a transporting part which transports a target substrate in a first direction.
申请公布号 US2013162965(A1) 申请公布日期 2013.06.27
申请号 US201213565073 申请日期 2012.08.02
申请人 KIM CHANG-HOON;SEO KAB-JONG;LEE HI-KUK;TORIGOE TSUNEMITSU;SAMSUNG DISPLAY CO., LTD. 发明人 KIM CHANG-HOON;SEO KAB-JONG;LEE HI-KUK;TORIGOE TSUNEMITSU
分类号 G03B27/54 主分类号 G03B27/54
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