| 摘要 |
<p>Transmission X-ray gratings (100) include a periodically stepped surface having a plurality of steps (104-109). A multilayer coating (114-119) is situated on each step in one set of substantially parallel step surfaces. The multilayer coating can be a series of alternating bilayers having different complex refractive indices at X-ray wavelengths. In one example, an etched silicon substrate (102) having periodic steps in a <100> surface is provided with suitable multilayer coatings having a common height (H) selected to correspond to a step height. A cap layer is formed over the multilayer coatings, so that the resultant X-ray grating has opposing parallel surfaces (124,126).</p> |
