| 摘要 |
<p>A coating for cutting tools or wear parts has at least one crystalline SixC1-x-y-zNyMz layer formed by means of a PVD method and at least one hard carbon layer, which is diamond or DLC. Si and C are essential components of the SixC1-x-y-zNyMz layer and M is one or more elements selected from among Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B, Al and Ru (wherein 0.4≰x≰0.6, 0≰y≰0.1, and 0≰z≰0.2). The SixC1-x-y-zNyMz layer has a half-value width of an SiC peak observed at 34° to 36° of diffraction angle when X-ray diffraction (XRD) is carried by using a CuKαray is 3° or less. A method for forming the coating layer using PVD is carried out under certain temperature and substrate bias conditions.</p> |
