| 发明名称 |
ELECTRICAL FUSE AND METHOD OF MAKING THE SAME |
| 摘要 |
An improved electrical-fuse (e-fuse) device (200) including a dielectric layer (102) having a first top surface (108), two conductive features (104, 106) embedded in the dielectric layer (102) and a fuse element (122). Each conductive feature (104, 106) has a second top surface (110, 112) and a metal cap (114, 116) directly on the second top surface (110, 112). Each metal cap (114, 116) has a third top surface (118, 120) that is above the first top surface (108) of the dielectric layer (102). The fuse element (122) is on the third top surface (118, 120) of each metal cap (114, 116) and on the first top surface (108) of the dielectric layer (102). A method of forming the e-fuse device (200) is also provided. |
| 申请公布号 |
WO2013095692(A2) |
申请公布日期 |
2013.06.27 |
| 申请号 |
WO2012US32040 |
申请日期 |
2012.04.04 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;YANG, CHIH-CHAO;GATES, STEPHEN, M.;LI, BAOZHEN;EDELSTEIN, DAN |
发明人 |
YANG, CHIH-CHAO;GATES, STEPHEN, M.;LI, BAOZHEN;EDELSTEIN, DAN |
| 分类号 |
H01L21/82;H01L21/8242;H01L23/62;H01L27/108 |
主分类号 |
H01L21/82 |
| 代理机构 |
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