WAFER PROCESSING APPARATUS

摘要

PURPOSE: A wafer processing device is provided to reduce the volume of the wafer processing device in the plane by installing a support unit supporting an FOUP(Front Opening Unified Pod) on the lower side of a stage. CONSTITUTION: A stage(120) is combined with the front part of a frame(110) at the lower side of an opening part(112). The stage mounts an FOUP(50) on the upper surface thereof. A door(130) is slidably installed in the left and right lateral direction of the frame. The door is detachably combined with a cover(51) of the FOUP supported by the stage. A control part(160) controls matters required for wafer processing.