SLIT COATER APPARATUS AND METHOD OF REMOVING PR SLURRIES ON INSIDE WALL OF SLIT NOZZLE THEREOF

摘要

PURPOSE: A slit coater apparatus is provided to automatically remove medicinal fluid sludge adhered on an inner wall of a slit nozzle by providing high pressurized solvent mixed gas to an outlet of the slit nozzle. CONSTITUTION: A slit coater apparatus(100) comprises a slit nozzle(110), a liquid chemical feeding pump(130), a connecting valve(150), and a solvent-mixed gas supplying unit(140). The slit nozzle spreads medicinal fluid. The liquid chemical feeding pump is connected to the slit nozzle with a first path(135) to supply a chemical to the slit nozzle through the first path. The connecting valve is formed on the first path, and located on a connecting part of the first path and a second path(145). The connecting valve is capable of operating to the first location and the second location. The first location communicates the slit nozzle and the liquid chemical feeding pump, and the second location communicated the slit nozzle and the second path. The solvent-mixed gas supplying unit supplies high pressurized solvent mixed gas to the second path.