CMP PAD CONDITIONER AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A CMP(Chemical Mechanical Polishing) pad conditioner and a manufacturing method thereof are provided to basically prevent a substrate from being bent and diamond of the conditioner from being separated by forming the CMP pad conditioner using a selective deposition method. CONSTITUTION: A diamond thin film(12) is formed on a substrate(11). A mask(30) having an opening part(35) in a matrix type is placed on the diamond thin film. The mask is made of one selected from molybdenum, tungsten and graphite. A protrusion part(15) comprising diamond(40) is formed on the diamond thin film. The mask is removed.