发明名称 Method for manufacturing an antifuse memory cell
摘要 A method for forming a memory cell including a selection transistor and an antifuse transistor, in a technological process adapted to the manufacturing of a first and of a second types of MOS transistors of different gate thicknesses, this method including the steps of: forming the selection transistor according to the steps of manufacturing of the N-channel transistor of the second type; and forming the antifuse transistor essentially according the steps of manufacturing of the N-channel transistor of the first type, by modifying the following step: instead of performing a P-type implantation in the channel region at the same time as in the N-channel transistors of the first type, performing an N-type implantation in the channel region at the same time as in the P-channel transistors of the first type.
申请公布号 US8470645(B2) 申请公布日期 2013.06.25
申请号 US201113038630 申请日期 2011.03.02
申请人 CANDELIER PHILIPPE;LE ROUX ELISE;STMICROELECTRONICS SA 发明人 CANDELIER PHILIPPE;LE ROUX ELISE
分类号 H01L21/8246 主分类号 H01L21/8246
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