发明名称 |
DEPOSITION APPARATUS FOR FABRICATING EMITTING DIODE |
摘要 |
PURPOSE: A deposition apparatus for fabricating a light emitting diode is provided to reduce process time by depositing a hole injection layer and an electron injection layer in one chamber. CONSTITUTION: A substrate supporter(430) is located in the upper surface of a chamber. A first crucible(422) includes a first source. The first crucible is inclined with a first angle in a first direction. A second crucible(424) includes a second source. The second crucible is inclined with a second angle in a second direction.
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申请公布号 |
KR20130068087(A) |
申请公布日期 |
2013.06.25 |
申请号 |
KR20110135444 |
申请日期 |
2011.12.15 |
申请人 |
LG DISPLAY CO., LTD. |
发明人 |
KWON, SUN KAP;LEE, SE HEE;KIM, HYUN SUK |
分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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