发明名称 DEPOSITION APPARATUS FOR FABRICATING EMITTING DIODE
摘要 PURPOSE: A deposition apparatus for fabricating a light emitting diode is provided to reduce process time by depositing a hole injection layer and an electron injection layer in one chamber. CONSTITUTION: A substrate supporter(430) is located in the upper surface of a chamber. A first crucible(422) includes a first source. The first crucible is inclined with a first angle in a first direction. A second crucible(424) includes a second source. The second crucible is inclined with a second angle in a second direction.
申请公布号 KR20130068087(A) 申请公布日期 2013.06.25
申请号 KR20110135444 申请日期 2011.12.15
申请人 LG DISPLAY CO., LTD. 发明人 KWON, SUN KAP;LEE, SE HEE;KIM, HYUN SUK
分类号 H01L51/56 主分类号 H01L51/56
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