| 摘要 |
Positional information of a movable body (RST) in a Y-axis direction is measured using an interferometer (16y) and an encoder ((24A, 26A 1 ), (24B, 26B 1 )) whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision. |
