发明名称 Semiconductor memory device and method of manufacturing the same
摘要 A semiconductor memory device according to an embodiment includes a cell array block having a plurality of cell arrays stacked therein, each of the cell arrays including a plurality of memory cells and a plurality of selective wirings selecting the plurality of memory cells are stacked, a pillar-shaped first via extending in a stack direction from a first height to a second height and having side surfaces connected to a first wiring, and a pillar-shaped second via extending in the stack direction from the first height to the second height and having side surfaces connected to a second wiring upper than the first wiring, the second wiring being thicker in the stack direction than the first wiring and having a higher resistivity than the first wiring.
申请公布号 US8471297(B2) 申请公布日期 2013.06.25
申请号 US201113070963 申请日期 2011.03.24
申请人 MURATA TAKESHI;KABUSHIKI KAISHA TOSHIBA 发明人 MURATA TAKESHI
分类号 H01L23/52 主分类号 H01L23/52
代理机构 代理人
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