| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power generation device that implements improved stability of power generation characteristics and improved power generation efficiency. <P>SOLUTION: The power generation device includes a MEMS (microelectromechanical systems) structure 1. The MEMS structure 1 has: a frame part 11; a vibration part 12 arranged inside the frame part 11; a pair of torsion spring parts 13 supported on the frame part 11 with the vibration part 12 in between; and a planar coil 14 formed on the vibration part 12. The power generation device further includes: two permanent magnets 2a, 2b oppositely arranged in a pair with the vibration part 12 and the planar coil 14 in between; and a support substrate 3 for supporting the MEMS structure 1 and the permanent magnets 2a, 2b in a predetermined relative positional relationship. In the power generation device, the pair of permanent magnets 2a, 2b are arranged with an aligned pole direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
