发明名称 POLISHING CLOTH
摘要 <P>PROBLEM TO BE SOLVED: To provide a suede polishing cloth capable of shortening a polishing time for securing the flatness of an object to be polished without affecting the quality of the object to be polished by increasing a polishing fluid effectively acting on polishing processing without increasing quantity, a concentration, and the processing pressure of the polishing fluid used in a polishing machine device and a polishing machine. <P>SOLUTION: A groove 7 having a depth extending from the polished surface 6 of a resin sheet 2 to a base 3 containing a large absorbed water amount per unit volume than the resin sheet 2 is formed in the resin sheet so as to increase the amount of the polishing fluid held by the polishing cloth 1 and the amount of water absorbed by the polishing cloth. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013123780(A) 申请公布日期 2013.06.24
申请号 JP20110274218 申请日期 2011.12.15
申请人 FILWEL:KK 发明人 TAGAWA MASAYA;OKUDAIRA TOMOYUKI
分类号 B24B37/26;B24B37/24;H01L21/304 主分类号 B24B37/26
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