发明名称
摘要 A fixed abrasive pad (100) in the form of a structured abrasive article is provided that has a structured abrasive layer (120) disposed on a backing (110). The structured abrasive layer (120) includes a polymeric binder, abrasive particles dispersed in the binder and a nonionic polyether surfactant dispersed in the binder. The abrasive particles have a mean particle size of less than 200 nm and the surfactant is in the binder in an amount of from 0.75 to 2.2 weight percent based upon the total weight of the structured abrasive layer. A method of abrading a workpiece using the provided fixed abrasive pad is also provided.
申请公布号 JP2013526777(A) 申请公布日期 2013.06.24
申请号 JP20130510126 申请日期 2011.04.29
申请人 发明人
分类号 H01L21/304;B24B37/24;B24B37/26 主分类号 H01L21/304
代理机构 代理人
主权项
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