SOFT MOLD AND METHOD MANUFACTURING THE SAME

摘要

PURPOSE: A soft mold and a manufacturing method of the same are provided to manufacture electrode patterns of 80um or less line widths by charging highly viscose fluid and forming a mold pattern. CONSTITUTION: A manufacturing method of a soft mold includes the following steps of: processing the surface(12) of a silicon substrate(10) based on a reactive ion etching method to have nanoscale surface roughness; patterning a photoresist pattern(20) on the surface of the silicon substrate; coating the surface of the silicon substrate with polymer(40); and separating the silicon substrate from the polymer to obtain a soft mold(50). The soft mold has the nanoscale surface roughness and a mold pattern(56). The mold pattern is charged with highly viscose fluid and is transferred on the surface of a touch panel.