发明名称 LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
摘要 An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. Alternatively or in addition, the optical system has a gas lock that receives the optical element. The opening interconnects the gas lock and the receiving region of the housing, and accommodates passage of the optical element between the gas lock and the receiving region.
申请公布号 US2013155509(A1) 申请公布日期 2013.06.20
申请号 US201313766174 申请日期 2013.02.13
申请人 CARL ZEISS SMT GMBH;CARL ZEISS SMT GMBH 发明人 SOYEZ GUIDO;BACK STEPHAN;BUECHELE JOACHIM;KALLER JULIAN;LIMBACH GUIDO;WOELFLE HARALD
分类号 G02B27/00 主分类号 G02B27/00
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