| 摘要 |
PURPOSE: A vacuum deposition apparatus is provided to maintain a vacuum in a deposition chamber regardless of the state of a supply unit in the deposition chamber by closing a vacuum valve between the deposition chamber and the supply unit. CONSTITUTION: A vacuum deposition apparatus(1) comprises a deposition chamber(100), a supply unit(200), and a vacuum valve(300). The deposition chamber comprises a chamber body(110), a crucible(120) arranged inside the chamber body and filled with a deposition material, and a supply tube(130) which is formed in the chamber body and guides the deposition chamber to be supplied to the crucible. The supply unit is arranged outside the deposition chamber and supplies the deposition material into the deposition chamber. The vacuum valve connects and disconnects the deposition chamber and the supply unit in a vacuum condition. |
