发明名称 MANUFACTURING A FLEXIBLE STRUCTURE BY TRANSFERS OF LAYERS
摘要 A method for manufacturing a flexible structure including implanting ionic species in first and second source substrates so as to form first and second embrittlement regions respectively, delimiting first and second thin films, providing a flexible substrate, the stiffness R of which is less than or equal to 107 GPa·mum3, securing the first and second thin films to the first and second faces of the flexible substrate respectively so as to form a stack including the flexible structure delimited by the first and second embrittlement regions, the flexible structure having a stiffening effect suitable for allowing transfers of the first and second thin films, and applying a thermal budget so as to transfer the first and second thin films onto the flexible substrate.
申请公布号 US2013156989(A1) 申请公布日期 2013.06.20
申请号 US201213718037 申请日期 2012.12.18
申请人 ATOMIQUE ET AUX ENERGIES ALTERNATIVES COMMISSARIAT A L'ENERGIE;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 MORICEAU HUBERT;ARGOUD MAXIME;FOURNEL FRANK;MAZEN FREDERIC;MORALES CHRISTOPHE
分类号 B32B38/10;B32B3/02;B32B7/02 主分类号 B32B38/10
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