| 摘要 |
PURPOSE: A semiconductor manufacturing process inspecting method of a management server is provided to convert a semiconductor image and a reference image into the numeric data for each pixel and compare each other, thereby remarkably reducing the inspection time. CONSTITUTION: An initial index image is produced by converting the color data of each pixel of the reference image into the numeric data(S506). A control index image is produced by removing the column and row pixels of the area which is not a comparing object in the initial index image(S508). For the control index images, the similarity of the reference image and a semiconductor image is determined(S510). The or more is determined that the or more is generated in the manufacturing process of the corresponding semiconductor in case the similarity of the semiconductor image is low less than the fixation standard(S514). A message which informs the abnormality in a semiconductor manufacturing process is transmitted to an inspection apparatus and an administrator terminal(S516). [Reference numerals] (AA) Start; (BB,DD) Yes; (CC,EE) No; (FF) End; (S502) Receive a semiconductor image?; (S504) Generate a reference image by integrating each pixel into a representative color by reconfiguring a reference image and a semiconductor image by each pixel unit; (S506) Generate an initial index image by converting color data of each pixel of the reference image into numeric data; (S508) Generate a control index image by removing a row pixel and a column pixel in an area where a comparison target is not corresponded in the initial index image; (S510) Determine the similarity of the reference image and the semiconductor image by comparing numeric data between pixels matched with the reference image and the semiconductor image; (S512) Is similarity low?; (S514) Determine that there is an error in a manufacturing process of a corresponding semiconductor; (S516) Transmit a message that there is an error in the manufacturing process to an test device and a management terminal
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