发明名称 |
TEXTURE-ETCHANT COMPOSITION FOR CRYSTALLINE SILICON WAFER AND METHOD FOR TEXTURE-ETCHING (2) |
摘要 |
<p>Disclosed herein is an etching composition for texturing a crystalline silicon wafer, comprising, based on a total amount of the composition: (A) 0.1 to 20 wt% of an alkaline compound; (B) 0.1 to 50 wt% of a cyclic compound having a boiling point of 100°C or more; (C) 0.000001 to 10 wt% of a fluorine-based surfactant; and (D) residual water. The etching composition can maximize the absorbance of light of the surface of a crystalline silicon wafer.</p> |
申请公布号 |
EP2604724(A2) |
申请公布日期 |
2013.06.19 |
申请号 |
EP20110816641 |
申请日期 |
2011.08.12 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
HONG, HYUNG-PYO;LEE, JAE-YOUN;LIM, DAE-SUNG |
分类号 |
C09K13/08;C09K13/02;H01L21/02;H01L31/0236 |
主分类号 |
C09K13/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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