发明名称 Probe card analysis system and method
摘要 A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.
申请公布号 US8466703(B2) 申请公布日期 2013.06.18
申请号 US20100862375 申请日期 2010.08.24
申请人 RUDOLPH TECHNOLOGIES, INC.;ENDRES ERIC;STROM JOHN T.;KUWASAKI CHRISTIAN;MCLAUGHLIN CHRISTOPHER 发明人 ENDRES ERIC;STROM JOHN T.;KUWASAKI CHRISTIAN;MCLAUGHLIN CHRISTOPHER
分类号 G01R1/067 主分类号 G01R1/067
代理机构 代理人
主权项
地址