| 摘要 |
This invention provides an apparatus for manufacturing a gas barrier plastic container that, in order to reduce the cost of the apparatus in the manufacture of a gas barrier plastic container, can simultaneously meet the requirements that an identical vacuum chamber can be used even in the case of a different container shape, the need to use a high-frequency power supply can be eliminated, and a film can be formed on a plurality of containers within one vacuum chamber. In an apparatus for forming a film on the inner surface of a container, a thermal catalyst is supported on a starting material gas feed pipe, and the starting material gas feed pipe is inserted into the port of the container, followed by film formation. In an apparatus for forming a film on the outer surface of a container, a thermal catalyst is disposed around the container, and a starting material gas is blown out through the starting material gas feed pipe while bringing the starting material gas into contact with the thermal catalyst for film formation. Cooling is carried out to avoid thermal deformation of the container by heat radiated from the thermal catalyst. For example, a container on which a hydrogen-containing SiNx thin film having a film thickness of 5 to 100 nm and having a hydrogen content of 1 to 10 atomic% has been formed, is obtained.
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