| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illumination apparatus for inspection and an illumination method for inspection which can irradiate an object with inspection light so that a difference such as a light-dark difference appears between a defect and a normal portion. <P>SOLUTION: The illumination apparatus for inspection includes: a surface light source 1 for emitting inspection light; a lens 2 provided on an optical axis LX of the inspection light emitted from the surface light source 1 between an inspection object W and the surface light source 1; and a first diaphragm 31 provided between the surface light source 1 and the lens 2 or between the lens 2 and the inspection object W. The positions of the surface light source 1 and the lens 2 against the inspection object W are set so that an image forming surface IM on which light from the surface light source 1 is image-formed is formed in the vicinity of the inspection object W. The position of the first diaphragm 31 against the lens 1 is set so that a center axis of an irradiation solid angle regulated by the inspection light made incident on an outer edge part of the image forming surface IM becomes parallel with the optical axis LX or deviated from the optical axis and inclined only by a predetermined angle. <P>COPYRIGHT: (C)2013,JPO&INPIT |
