| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell, which is capable of electrically separating a first conductivity type amorphous silicon film from a second conductivity type amorphous silicon film more reliably. <P>SOLUTION: The method for manufacturing a solar cell comprises the steps of: forming a coating film 31 on a first conductivity type amorphous silicon film 8; laminating an i-type amorphous silicon film 19 and a second conductivity type amorphous silicon film 20 on the rear surface of a semiconductor substrate 51 and the coating film 31; and removing the coating film 31 by etching. The coating film 31 on the first conductivity type amorphous silicon film 8 is positioned inside a region of the first conductivity type amorphous silicon film 8. <P>COPYRIGHT: (C)2013,JPO&INPIT |
