| 摘要 |
PURPOSE: An ultrasonic bonding device equipped with a stage fixed type ultrasonic horn is provided to reduce minute errors on a contact plane by fixedly combining an ultrasonic horn with a fixed lower stage, thereby being capable of obtaining a relatively reliable result. CONSTITUTION: A jig base(10) is provided to be vertically movable. A pressurization member(20) moves vertically according to the movement of a jig base. The pressurization member has a pressurization plane(20a) formed on the lower part to pressurize an object for connection. An elastic member(30) is combined between the jig base and the pressurization member and provides the elastic force between the pressurization member and the jig base. An ultrasonic horn(40) is positioned on a stage(100) arranged with a space from the lower part of the jig base. A fixing jig(60) is combined with the ultrasonic horn and delivers the vibration energy generated by the vibration of the ultrasonic horn to a substrate and a chip. |
