| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique advantageous in reducing a measurement error due to a positional shift of a knife edge. <P>SOLUTION: A charged particle beam device including an irradiation unit for irradiating a subject with a plurality of charged particles beams includes: a measuring instrument for measuring characteristics of the plurality of charged particle beams; and a control unit. The measuring instrument includes: a plate which has a plurality of knife edges; and a sensor which detects charged particle beams entering through the plate. The control unit scans one charged particle beams selected from the plurality of charged particle beams relative to the measuring instrument so that the one charged particle beam crosses at least two knife edges among the plurality of knife edges, and generates correction information for correcting a measurement error of the measuring instrument due to deformation of the plate based upon output of the sensor during the scanning. <P>COPYRIGHT: (C)2013,JPO&INPIT |
