发明名称 |
HIGH-SENSITIVITY TRANSPARENT GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
Disclosed are a high-sensitivity transparent gas sensor and a method for manufacturing the same. The transparent gas sensor includes a transparent substrate, a transparent electrode formed on the transparent substrate and a transparent gas-sensing layer formed on the transparent electrode. The transparent gas-sensing layer has a nanocolumnar structure having nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns. |
申请公布号 |
US2013146865(A1) |
申请公布日期 |
2013.06.13 |
申请号 |
US201213542874 |
申请日期 |
2012.07.06 |
申请人 |
JANG HO WON;YOON SEOK JIN;KIM JIN SANG;KANG CHONG YUN;CHOI JI WON;MOON HI GYU;KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
JANG HO WON;YOON SEOK JIN;KIM JIN SANG;KANG CHONG YUN;CHOI JI WON;MOON HI GYU |
分类号 |
H01L29/12;B82Y15/00;H01L21/02 |
主分类号 |
H01L29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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