发明名称 NITRIDE BASED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 Disclosed herein is a nitride based semiconductor device, including: a substrate; a nitride based semiconductor layer having a lower nitride based semiconductor layer and an upper nitride based semiconductor layer on the substrate; an isolation area including an interface between the lower nitride based semiconductor layer and the upper nitride based semiconductor layer; and drain electrodes, source electrode, and gate electrodes formed on the upper nitride based semiconductor layer. According to preferred embodiments of the present invention, in the nitride based semiconductor device, by using the isolation area including the interface between the lower nitride based semiconductor layer and the upper nitride based semiconductor layer, problems of parasitic capacitance and leakage current are solved, and as a result, a switching speed can be improved through a gate pad.
申请公布号 US2013146983(A1) 申请公布日期 2013.06.13
申请号 US201213406123 申请日期 2012.02.27
申请人 PARK YOUNG HWAN;JEON WOO CHUL;PARK KI YEOL;HONG SEOK YOON;SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 PARK YOUNG HWAN;JEON WOO CHUL;PARK KI YEOL;HONG SEOK YOON
分类号 H01L27/088;H01L21/336 主分类号 H01L27/088
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