Method for manufacturing mirror i.e. bi-functional mirror, for extreme-UV projection exposure system, involves smoothening reflecting surface, and generating structured upper surface by activation of surface phase transitions

摘要

The method involves defining a reflecting surface for reflecting light by a structured upper surface that includes a defined structure for homogenizing the reflected light to perform a control of the reflected light. A material is provided with a fabric structure (2) that is influenced at surface phase transitions in the structure, so that the phase transitions arise in the structure. The reflecting surface is smoothened for the formation of reflecting surface with surface roughness for an extreme UV lithography (100). The upper surface is generated by activation of the phase transitions. Independent claims are also included for the following: (1) a mirror for an extreme-UV projection exposure system (2) an extreme-UV projection exposure system (3) a method for operating an extreme-UV projection exposure system with a mirror.