MICRO-FABRICATED ATOMIC MAGNETOMETER AND METHOD OF FORMING

摘要

The cost and size of an atomic magnetometer (Figure 2, 200) are reduced by attaching a vapor cell structure (240) that has a vapor cell cavity (242) to a base die (270) that has a laser light source (286) that outputs light to the vapor cell cavity, and attaching a photodetection die (210) that has a photodiode (214) vertically aligned with the vapor cell structure to detect light from the laser light source that passes through the vapor cell cavity.