RETAINING RING, FLEXIBLE MEMBRANE FOR APPLYING LOAD TO RETAINING RING, AND RETAINING RING ASSEMBLY

摘要

PROBLEM TO BE SOLVED: To provide a carrier head having: a retaining ring assembly which is formed of a retaining ring retaining a substrate, and a flexible membrane applying a load to the retaining ring in such a way of reducing nonuniform wear; a base assembly; and a carrier ring.

SOLUTION: The retaining ring assembly included in the carrier head 100 has a first flexible membrane 300 shaped to provide an annular chamber 350 and an annular retaining ring 200 retaining the substrate 10, wherein annular concentric projections of the first flexible membrane 300 are sized to be fitted into annular concentric recesses of the annular retaining ring 200.

COPYRIGHT: (C)2013,JPO&INPIT