| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus and method for a rod lens array in which the state where a rod lens end face of the rod lens array is inclined with respect to a surface of the rod lens orthogonal to a substrate surface can be measured easily and promptly. <P>SOLUTION: An inspection apparatus for a rod lens array for measuring the inclination of a rod lens end face of the rod lens array comprises a light source which generates a beam, a support device which supports the rod lens array so as to reflect the beam on the rod lens end face, and a screen on which light reflected on the rod lens end face of the rod lens array is projected. The support device includes at least three columnar members, two of the columnar members are disposed while being aligned to support one side face of the rod lens array along a tangent common for the two columnar members, and the remaining one columnar member is disposed to support another side face of the rod lens array. <P>COPYRIGHT: (C)2013,JPO&INPIT |
