| 摘要 |
<p>The purpose of the present invention is to provide an image acquisition device having a wide visual field and a high-resolution objective optical system wherein blur caused by defocus is minimized and a good digital image is acquired even when there is undulation in the surface shape of a test sample. In order to achieve the abovementioned purpose, the image acquisition device that is one aspect of the present invention is characterized by: the provision of a test object stage for holding a test object, a measuring unit that acquires surface shape information regarding the test object, and a microscope unit containing an objective optical system that forms an image of the test object and an imaging element that captures an image of the image formed by the objective optical system; the measuring unit acquiring information regarding a first stage inclination of the test object stage; and by the microscope unit adjusting the test object stage orientation on the basis of the relationship between the surface shape information and the information regarding the first stage inclination.</p> |
