发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR MANUFACTURING PRINTED WIRING BOARD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition showing excellent resolution, adhesiveness, and a resist profile of a resist pattern to be formed. <P>SOLUTION: The photosensitive resin composition includes: a binder polymer having a structural unit derived from (meth)acrylic acid and a structural unit derived from at least one kind of (meth)acrylate selected from the group consisting of (EO)-modified dicyclopentenyl (meth)acrylate, (EO)-modified dicyclopentanyl (meth)acrylate, (EO)-modified isobornyl (meth)acrylate, (EO)-modified adamantyl (meth)acrylate, and (EO)-modified cyclohexyl (meth)acrylate; a photopolymerizable compound; and a photopolymerization initiator. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013117716(A) |
申请公布日期 |
2013.06.13 |
申请号 |
JP20120237445 |
申请日期 |
2012.10.29 |
申请人 |
HITACHI CHEMICAL CO LTD |
发明人 |
MURAMATSU YUKIKO;MIYASAKA MASAHIRO;OKADE SHOTA |
分类号 |
G03F7/033;C08F2/44;C08F2/50;C08F220/00;C08F265/00;G03F7/004;G03F7/027;G03F7/029;G03F7/031;H05K3/00;H05K3/06;H05K3/18 |
主分类号 |
G03F7/033 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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