| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric oscillator capable of minimizing frequency variation. <P>SOLUTION: A piezoelectric oscillating piece 10, which comprises an oscillating arm 16 and in which a metal film 34 and an exciting electrode film are formed in the oscillating arm 16, is prepared. By forming ruggedness on the metal film 34 by using a laser beam, a surface area of the metal film 34 is enlarged. The piezoelectric oscillating piece 10 is mounted in a package 40 thereafter. The metal film 34 is etched by an ion beam thereafter. Internal space of the package 40 is air-tightly sealed thereafter. <P>COPYRIGHT: (C)2013,JPO&INPIT |
