| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspection apparatus which is capable of ensuring inspection accuracy even for inspection subject patterns for which a position of formation or color shading is different within a range that is ignorable in performance and the way of difference does not have fixed tendency (is varied). <P>SOLUTION: A visual inspection apparatus 10 comprises an image processing section 32 which determines the propriety of an inspection subject by analyzing image data of an inspection subject pattern Po obtained by an observation mechanism 11 while using a prepared sample pattern Pm. The image processing section 32 performs boundary inspection processing of the inspection subject pattern Po to execute, as analysis processing, an item (step S42) of generating an average boundary image Ib for each divided region Dn and determining whether or not a precision ratio Pc between the average boundary image Ib and the sample pattern Pm is included within an allowable range, and an item (step S45) of extracting a defect candidate Lc by determining a differential between a reference boundary image Bn generated from the average boundary image Ib and the inspection subject pattern Po, and determining whether the defect candidate Lc is within the allowable range. <P>COPYRIGHT: (C)2013,JPO&INPIT |
