| 发明名称 |
LOADING ELEMENT OF A FILM BULK ACOUSTIC RESONATOR |
| 摘要 |
Manufacturing a semiconductor structure including modifying a frequency of a Film Bulk Acoustic Resonator (FBAR) device though a vent hole of a sealing layer surrounding the FBAR device.
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| 申请公布号 |
US2013147319(A1) |
申请公布日期 |
2013.06.13 |
| 申请号 |
US201113323285 |
申请日期 |
2011.12.12 |
| 申请人 |
ADKISSON JAMES W.;CANDRA PANGLIJEN;DUNBAR THOMAS J.;GAMBINO JEFFREY P.;JAFFE MARK D.;STAMPER ANTHONY K.;WOLF RANDY L.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ADKISSON JAMES W.;CANDRA PANGLIJEN;DUNBAR THOMAS J.;GAMBINO JEFFREY P.;JAFFE MARK D.;STAMPER ANTHONY K.;WOLF RANDY L. |
| 分类号 |
H01L41/053;H01L21/50;H01L21/66 |
主分类号 |
H01L41/053 |
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