| 发明名称 |
MAGNETIC DEVICE AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
A method of manufacturing a magnetic device includes forming a stack structure, the stack structure including a magnetic layer, and etching the stack structure by using an etching gas, the etching gas including at least 80% by volume of H2 gas. |
| 申请公布号 |
US2013146997(A1) |
申请公布日期 |
2013.06.13 |
| 申请号 |
US201213600422 |
申请日期 |
2012.08.31 |
| 申请人 |
LEE WOO-CHEOL;KEN TOKASHIKI;KWON HYUNG-JOON;JUNG MYUNG-HOON |
发明人 |
LEE WOO-CHEOL;KEN TOKASHIKI;KWON HYUNG-JOON;JUNG MYUNG-HOON |
| 分类号 |
H01L43/12;H01L27/22 |
主分类号 |
H01L43/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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