| 摘要 |
PURPOSE: A deposition apparatus including a rotatable susceptor pocket is provided to form a uniform thin film by rotating a substrate. CONSTITUTION: A susceptor(10) is rotatably arranged. The susceptor includes pocket slots(11). A susceptor pocket(20) is mounted in the pocket slot. The susceptor pocket is rotated in the pocket slot. A driving device includes a permanent magnet and an electromagnet.
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