发明名称 |
Carrier mobility enhanced channel devices and method of manufacture |
摘要 |
An integrated circuit with stress enhanced channels, a design structure and a method of manufacturing the integrated circuit is provided. The method includes forming a dummy gate structure on a substrate and forming a trench in the dummy gate structure. The method further includes filling a portion of the trench with a strain inducing material and filling a remaining portion of the trench with gate material.
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申请公布号 |
US8461625(B2) |
申请公布日期 |
2013.06.11 |
申请号 |
US201113080352 |
申请日期 |
2011.04.05 |
申请人 |
CHENG KANGGUO;YANG HAINING S.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHENG KANGGUO;YANG HAINING S. |
分类号 |
H01L29/78 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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