| 摘要 |
<p>PURPOSE: A work piece installation device, a work piece installation method, and a work piece holding support separating method are provided to easily separate each work piece holding support from the work piece, and to install a work piece held and supported to multiple work piece holding supports is intactly placed on the other work piece. CONSTITUTION: A work piece installation device comprises a first table(15), a second table(17), a device for determinating a table location(45), a work piece holding support device(19), and a control device(13). A work piece installation method comprises a first work piece installation process, a second work piece holding support process, a second work piece installation process, a work piece pressure process, a second table separation process, and a work piece holding support separation process. A work piece holding support seperating method aims to separate a work piece holding support holding and supporting a work piece by at least any one among a vacuum suction, and an adhesive from the work piece by giving a vibration to at least any one among the work piece, and the work piece holding support. [Reference numerals] (AA) B axis; (BB) A axis; (CC) C axis; (DD) Upper part; (EE) X axis direction; (FF) Down part; (GG) Z axis direction; (HH) Y axis direction</p> |
