| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating device which can easily replace a mouth piece part when a substrate conveyance path continuously extends in one direction. <P>SOLUTION: A coating device includes: a substrate conveyance path which extends in one direction; a substrate conveyance part which conveys a substrate along a direction in which the substrate conveyance path extends in a state that the substrate is faced with the substrate conveyance path; and a coating unit which is installed by fixing it in a state that a mouth piece part is faced with the substrate conveyance path. The coating device further includes a mouth piece transfer unit on which the mouth piece part is mounted and which can move to a mouth piece acceptance position facing the mouth piece part attached to the coating unit and to a mouth piece replacement position where the mouth piece part is replaced. The substrate conveyance path has a work space formation part. By the work space formation part, a work space for replacing the mouth piece part is formed by removing a part of the substrate conveyance path. The mouth piece replacement position is set in a range in which the replacement work of the mouth piece part can be performed in the work space formation part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
