| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect correcting apparatus allowing a user to observe a heating condition of a correction liquid while heating the correction liquid applied to a defective portion. <P>SOLUTION: A defect correcting apparatus 1 comprises: an observation optical system 7 for observing a front face of a substrate 4; an imaging camera 12 for imaging an image of the front face of the substrate 4 through the observation optical system 7; a coating unit 11 for coating a disconnection defective portion 4b with a correction liquid 22; a heating laser 8 for irradiating and calcinating the correction liquid 22 applied to the disconnection defective portion 4b with a laser beam; and an attenuation filter 14 provided insertably and removably in front of the imaging camera 12 to attenuate scattered light of the laser beam. Accordingly, the apparatus 1 can prevent halation arising from the scattered light of the laser beam. <P>COPYRIGHT: (C)2013,JPO&INPIT |
